Microengineering, MEMS, and Interfacing: A Practical Guide (Repost)

Description for Microengineering MEMS and Interfacing A Practical Guide Repost

Danny Banks, «Microengineering, MEMS, and Interfacing: A Practical Guide»
CRC Press | ISBN: 0824723058 | 2006 | PDF | 352 pages | 8.65 MB

“

Microengineering and Microelectromechanical systems (MEMS) have very few watertight definitions regarding their subjects and technologies. Microengineering can be described as the techniques, technologies, and practices involved in the realization of structures and devices with dimensions on the order of micrometers. MEMS often refer to mechanical devices with dimensions on the order of micrometers fabricated using techniques originating in the integrated circuit (IC) industry, with emphasis on silicon-based structures and integrated microelectronic circuitry. However, the term is now used to refer to a much wider range of microengineered devices and technologies.

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