Silicide Technology for Integrated Circuits

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Silicide Technology for Integrated Circuits
Publisher: The Institution of Engineering and Technology | Pages: 304 | 2004-12-17 | ISBN 0863413528 | PDF | 2.3 MB
Scope: This is the first book to provide guidance on the development and application of metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages. Other key topics covered are fundamentals, present and future silicide technology for Si-based devices, and characterisation methods.



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